Shorter wavelengths and/or increasing the numerical aperture lead to higher resolution. By avoidance of classical immersion optics and by way of so-called superresolution, an improvement of resolution about a factor 2–2.5 can be achieved as compared with the microscopes of today.
W. Vollrath
Leica Microsystems Wetzlar GmbH, Germany
Scientific and Technical Information
Edition CDR 2, pp. 46–64
April 1999