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Modular high vacuum coating system Leica EM MED020

The Leica EM MED020 modular high vacuum coating system

The Leica EM MED020 is a precision high vacuum coating system for sputtering, carbon thread, carbon rod, top down and bottom up thermal resistance and dual electron beam evaporation.

Available for all applications is a quartz crystal film thickness monitor which ensures highest reproducibility of sputtered or evaporated layers by precisely measuring film thickness and coating rates.

Optional modules allow cryo preparation methods including freeze fracture/etching, freeze drying, double replica, cryo coating and vacuum cryo transfer with the Leica EM VCT100 for cryo SEM, FIB, AFM, SIMS or XPS observation.

Your Advantages

Unique modular instrument

Unique modular instrument offering a wide selection of applications, and quick and easy conversions result in a versatile instrument which can be operated by many laboratory users requiring various applications.

High performance vacuum system

High performance oil-free vacuum and pumping system results in no oil back-stream, no contamination and provides high resolution sputter or carbon coating for the latest high resolution field emission SEMs, TEMs as well as vacuum coatings for various applications in optics, physics or electronics.

Stepless height adjustable specimen table

Stepless height adjustable specimen table for defined film deposition with minimum specimen damage with pre-selectable and permanently stored sputtering parameters.

Rotary-planetary-tilting stages

Rotary-planetary-tilting stages provide shadowing at pre-selectable coating angles, multiple angle movements and rapid configuration modifications.


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