Ion beam slope cutting is a method that can achieve flat cross sections of soft materials or material combinations consisting of hard and soft components. The CuSn connector is very soft. Mechanical polishing leads to smearing.
Cross section to see the layer structure and their interfaces.
(benchmark values for this particular sample)
Mechanical pre-preparation with Leica EM TXP using 9 µm diamond lapping foil at 2600 rpm.
|TIC 3X Parameters|
|Acceleration voltage||7 kV|
|Gun current||2.6 mA|
|Milling time||6 h|