This Application Note describes the preparation method
"Cross Sectioning of Multilayer for EBSD"
Electron Backscattered Diffraction (EBSD) is a surface technique creating a diffraction pattern (Kikuchi-bands). It can be used for crystal orientation mapping, defect studies, phase identification, grain boundary studies and morphology studies. The information depth is just a few nm. Therefore good sample preparation is very important to avoid any damage. This is very difficult in case of multilayer system with big differences in hardness.
By Wolfgang Grünewald, Leica Microsystems, Chemnitz, Germany
Download the Application Note (PDF, 4.41 MB)