Abstract

Automated Digital 3D Topography Measurement with the Leica DCM 3D Dual Core Measuring Microscope

The precise measurement of surface structures and topography is the key thing during the production, control and development in many sectors of industry or research. Because very often there is not possible to use some contact methods for performing this task new optical methods based on interferometry and confocal technology started to be available for non-contact surface metrology in the recent years. The Leica DCM 3D dual core measuring system introduces the unique machine which combines the advantages of both – confocal and interferometry. Now we have in our hands a very useful and flexible tool for super fast, precise and non-destructive assessment of the micro- and nano-geometries of critical material surfaces.

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Matêásko J:
Automated Digital 3D Topography Measurement with the Leica DCM 3D Dual Core Measuring Microscope

Published in: Conference Proceedings, 22nd International Metal 2013, 15.–17. 5. 2013, Brno, Czech Republic

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