Cross Section of an Aluminium Sample for Electron Backscattered Diffraction (EBSD)

Application Note for Leica EM TIC020, Leica EM TIC 3X - Material Research


Electron backscattered diffraction (EBSD) is for example used to examine the crystallographic orientation of material. The sample preparetion for such samples is sometimes very tricky as the depth of information is just few nm (~20nm or less). That means the sample surface must be flat and free of preparation artefacts. Mechanical polishing leads mostly to sample surfaces damages.

Perfect sample surface for EBSD using the slope cutting method.

Process description (benchmark values for this particular sample)

The surface quality of the Al sample is excellent.
The diffraction pattern (Kikuchi-bands) proofs the preparation quality.
An orientation mapping shows the orientation of the different grains of aluminium.

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