Purpose
Electron Backscattered Diffraction (EBSD) is a surface technique creating a diffraction pattern (Kikuchi-bands). It can be used for crystal orientation mapping, defect studies, phase identification, grain boundary studies and morphology studies. The information depth is just a few nm. Therefore a good sample preparation is very important.
Goal
Preparation of a perfect sample surface for EBSD.
Process Description
(benchmark values for this particular sample)
Mechanical pre-preparation with the Leica EM TXP using 9 µm diamond lapping foil at 2600 rpm.
| TIC 3X Parameters | |
| Acceleration voltage | 7 kV |
| Gun current | 2.6 mA |
| Milling time | 6 h |
Results
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