Ion beam (flat) milling:
TIC 3X rotary stage | |
Acceleration voltage | 7 kV |
Gun current | 3 mA |
Milling time | 40 min |
Rotation speed | ~40 rpm |
Lateral movement | +/- 10 mm |
Following images were taken with a table top SEM. Hence, high quality images can’t be achieved. However, following images prove an ion beam impact in the center and on 25mm rim of the oil shale sample. It shows improvements compared to the mechanical polishing step on the high mag images.