Leica is MAD about LIBS

To LIBS or not to LIBS, that is the question

When analyzing material for cleanliness testing, users normally just want a simple way to know whether the particle under scrutiny is normal debris or something more risky. Users can now “LIBS” it to acquire rapidly the composition and then move onto the next manufacturing step.



Laser-Induced Breakdown Spectroscopy (LIBS) is directly integrated into the DM6 M LIBS 2-in-1 solution. The LIBS operating principles are: 

  • Laser light is focused by the microscope optics to a very small spot on the analyzed material;
  • Rapid heating of the illuminated area occurs and a plasma is formed;
  • Eventually the plasma relaxes and light is emitted;
  • Finally, the optics spectrally detect the emitted light.

The DM6 M LIBS solution produces a chemical fingerprint for the analyzed material which can be referenced back to a user-created database.

Most material elemental analysis is performed with Scanning Electron Microscopy (SEM) using Energy Dispersive X-Ray Spectroscopy (EDS). SEM/EDS has the advantage of doing quantitative compositional analysis, but it needs time – minutes to hours. The long waiting-time for results can be a serious problem in a time-sensitive production environment.

On the other hand, the DM6 M LIBS solution is a time-saving machine. If users want to know a particle’s composition, they can click a button to analyze the material with LIBS on the spot. No need to transfer the sample to a SEM. Average users can provide reliable, accurate information quickly as the DM6 M LIBS software is easy to learn and operate.

So whenever questions come up during cleanliness analysis about particular particles and where they come from, these can be answered on the line within minutes using the DM6 M LIBS 2-in-1 solution.

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Tjepkema M:

Leica is MAD about LIBS 

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