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TEM Sample Preparation Made Easy - Prepare TEM Specimen by Broad Beam Argon Ion Milling

Quantitative and analytical analysis at high spatial resolution places stringent demands on the quality of the produced TEM specimens. Pristine and high-quality samples are indispensible for atomic resolution TEM analysis. In this application note a general procedure for obtaining cross-sectional and plan-view TEM specimens using the Leica EM RES102 ion milling system is outlined. The procedure described below can be easily adapted for a large range of materials e.g. thin film materials, semiconductors, multilayered materials, ceramics, superconductors, …


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Leroux F, Gauquelin N, Turner S, Van Tendeloo G

Procedure for TEM sample preparation of materials for atomic-resolution analysis

Leica Microsystems Application Note, October 2015