Leroux F, Gauquelin N, Turner S, Van Tendeloo G
Procedure for TEM sample preparation of materials for atomic-resolution analysis
Leica Microsystems Application Note, October 2015
Quantitative and analytical analysis at high spatial resolution places stringent demands on the quality of the produced TEM specimens. Pristine and high-quality samples are indispensible for atomic resolution TEM analysis. In this application note a general procedure for obtaining cross-sectional and plan-view TEM specimens using the Leica EM RES102 ion milling system is outlined. The procedure described below can be easily adapted for a large range of materials e.g. thin film materials, semiconductors, multilayered materials, ceramics, superconductors, …
Leica Microsystems Application Note, October 2015