Leica DM12000 M
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Leica DM12000 M 半導体検査顕微鏡（12インチウエハ用）<br>
Publications 2017
A low cost patternable packaging technology for biosensors
Buchoux A Blair E Tsiamis A Marland J Smith S
2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)
2017 pp: 1-6