DM3 XL
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Leica Microsystems
DM3 XL Inspection System for Microelectronics and Semiconductor
Fast detection, fast action
Archived Product
This item has been phased out and is no longer available. Please contact us to enquire about recent alternative products that may suit your needs.
Stand | Sturdy metal stand |
Focusing | 2-gear focusing (coarse/fine with 1 µm micrometer scale with top focus stop) or 3-gear focusing (coarse/medium/fine with 1 and 4 µm micrometer scales with top focus stop) Torque coarse focus, adjustable stage height stop |
Stage stroke | 30 mm |
Incident light | Robust incident light axis with 4-position reflector turret for BF/DF/POL/DIC and FLUO
|
Objective turret / Objectives | 5x BF/DF M32, 6x BF M25 and 7x BF M25 objective turret
|
Accessories | Optional magnification changer (1x, 1.5x, 2x) Optional measuring stage s for x, y, and z measurements |
Transmitted light | Illumination via external cold light source with light fibre |
Power supply | Stabilized universal power supply unit, 90 - 230 V |