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DM3 XL Inspection System for Microelectronics and Semiconductor

Fast detection, fast action

Archived Product
This item has been phased out and is no longer available. Please contact us to enquire about recent alternative products that may suit your needs.
Stand Sturdy metal stand
Focusing 2-gear focusing (coarse/fine with 1 µm micrometer scale with top focus stop) or
3-gear focusing (coarse/medium/fine with 1 and 4 µm micrometer scales with top focus stop)
Torque coarse focus, adjustable stage height stop
Stage stroke 30 mm
Incident light Robust incident light axis with 4-position reflector turret for BF/DF/POL/DIC and FLUO
  • with oblique illumination
  • with Color-Coded Diaphragm Assistant (CCDA)
  • with centreable Aperture iris diaphragm
  • with IL-Filter magazine for 2 filters - Ø 32 mm
The following light sources can be adapted to all incident light axes:
  • LED-Lamphousing with internal microscope control of the light intensity for incident light
  • Mirrorhousing 106, for simultaneous adaptation of two light sources
  • Fluo-illumination SFL100, 4000 and 7000
  • EL6000, Hg 50, Hg 100, Xe 75
  • 12 V 100 W Halogen (Lamp housing series 106 or 107/2) with separate transformer
Objective turret /
Objectives
5x BF/DF M32, 6x BF M25 and 7x BF M25 objective turret
  • HI PLAN EPI Objectives 5x, 10x, 20x
  • N PLAN EPI Objectives 2.5x - 100x
  • PLAN FLUOTAR Objectives 1.25x - 100x
  • PLAN APO Objectives 0.7x Macro 50x, 100x, 150x
Accessories Optional magnification changer (1x, 1.5x, 2x)
Optional measuring stage s for x, y, and z measurements
Transmitted light Illumination via external cold light source with light fibre
Power supply Stabilized universal power supply unit, 90 - 230 V
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