Fast detection, fast action
The Inspection System for Microelectronics and Semiconductor DM3 XL
Speed matters in inspection, process control, or defect and failure analysis for the microelectronics and semiconductor industry. The faster you detect a defect, the faster you can react.
30% more field of view
With a large field of view, the DM3 XL inspection system allows your team to identify defects faster and increase your yield rate. Make use of the 30% increased field of view of the unique macro objective.
See more, work faster
Seeing more means working faster. To rapidly scan large components up to 6’’, the DM3 XL provides a unique macro objective.
With a magnification of 0.7x it captures a field of view of 35.7 mm at once – 30% more than with other conventional scanning objectives.
With the macro objective, defects don’t stand a chance:
- Increase your yield
- Reliably detect insufficient development at the edge or within the center of a wafer
- Detect uneven radial film thickness
LED for all contrast methods
The DM3 XL uses LED illumination for all contrast methods. LED illumination provides a constant color temperature and offers real color imaging at all intensity levels.
- True-to-life color imaging at all intensity levels
- Adjustment-free
- No bulb exchange – no down-time
- Reproducible results
With a long lifetime and low power consumption, LEDs also have an enormous cost savings potential.
Optical high performer
With the DM3 XL, you can benefit from optical excellence at an affordable price.
- Examine sides, edges or chippings with oblique illumination: illuminate your sample from different angles as an easy and effective way to visualize topographies.
- Detect micro scratches or small particles in lower layers of the sample with in-depth darkfield contrast.
You’ll be stunned by the dramatically increased sensitivity and resolution.
Find out more about our range of objectives at the Leica Optics Center.
Variety of samples – variable stage inserts
No matter what sample size and sample type you would like to inspect, you can choose from a variety of stage inserts:
- Stage size: 150 mm x 150 mm
- Stage inserts: Metal inserts, wafer holders or mask holders
- Quick coarse or fine stage positioning
Work comfortably and intuitively
Simplifying the basic setting of resolution, contrast, and depth of field, the Color Coded Diaphragm Assistant (CCDA) helps to speed up your work and minimize operational errors.
Straightforward and intuitive functionality allows your team to deliver optimal results faster.
- Leave your hands on the microscope and your eyes on the sample while switching contrast or illumination thanks to easily reachable controls
- Easily handle the light intensity controller with the right hand
- Adjust the microscope to different body heights with variable ErgoTubes and focus knobs
Interested to know more?
Talk to our experts. We are happy to answer all your questions and concerns.
Contact us nowDo you prefer personal consulting?
- Leica Microsystems Inc.1700 Leider LaneBuffalo Grove, IL 60089United StatesOffice Phone: +1 800 248 0123Service Phone: 1 800 248 0223Fax: +1 847-236-3009
- Precision Lens5715 West Old Shakopee Road Unit 150Bloomington, 55437United StatesOffice Phone: 952-881-0414
- JH Technologies, Inc.213 Hammond AvenueFremont, 94539United StatesOffice Phone: 408-436-6336Fax: 408-436-6343
- ECLIPSE SURGICAL SUPPLY LLC616 FAIRWAY MIST CTMINT HILL, 28227United StatesOffice Phone: 410-299-2711
- Great Plains Surgical, Inc.3605 Hidden CircleWest Fargo, 58078United StatesOffice Phone: 701-391-3333Service Phone: 701-391-3333Fax: 701-364-0307
- ICMAS Inc.
- Integrity Surgical2303 Ranch Road 620 S Suite 160-310Lakeway, 78734United StatesOffice Phone: 713-201-8787
- Next Case Surgical943 Maple Avenue - Upper LevelDowners Grove, 60515United StatesOffice Phone: 312-520-7600Fax: 219-662-7353
- Proficient Surgical Equipment, Inc99 Seaview Blvd. Suite CPort Washington, 11050United StatesOffice Phone: 516-487-1175Fax: 516-487-1191
- JH Technologies, Inc. - Neast213 Hammond AveFremont, 94539United StatesOffice Phone: 408-436-6336Fax: 408-436-6343
- JH Technologies So. Cal213 Hammond AveFremont, 94539United StatesOffice Phone: 408-436-6336Fax: 408-439-6343
- Q Surgical28 Liberty Ship Way Suite 2830Sausalito, 94965United StatesOffice Phone: 415-331-1020Fax: 415-462-5186
- Rohlf Medical, Inc.2600 S. Minnesota Ave Suite 101Sioux Falls, 57105United StatesOffice Phone: 605-334-8655Fax: 605-334-9102
- Shawnee Medical Products, Inc.8401 Juniper LanePrairie Village, 66207United StatesOffice Phone: 913-341-7520Fax: 913-341-2318
- Spective, LLC
- Spective LLC - Canada
- SurgicalOne, Inc.23030 E Industrial DriveSAINT CLAIR SHORES, 48080United StatesOffice Phone: 586-775-3300Fax: 586-775-3301
- TAP Medical Products, Inc.4580 Klahanie Drive S.E. #452Issaquah, 98029United StatesOffice Phone: 425-785-9993Fax: 800-832-1859
- Western Microsurgical6721 Esperanza DriveCastle Rock, 80108United StatesOffice Phone: 720-244-4679Fax: 303-331-8128
- NCI, Inc.7125 Northland Terrace N. Suite 100Brooklyn Park, 55428United StatesOffice Phone: 763-559-3008Fax: 763-559-7372
- NCI, Inc.7125 Northland Terrace N. Suite 100Brooklyn Park, 55428United StatesOffice Phone: 763-559-3008Fax: 763-559-7372
- W. Nuhsbaum Inc.760 Ridgeview DriveMcHenry, 60050United StatesOffice Phone: 815-385-5200Fax: 815-385-5236
- Angstrom Scientific Inc.120 N CENTRAL AVE STE 3Ramsey, 07446United StatesOffice Phone: 201.962.7222Fax: 201.962.8290
- Associated Microscope Inc.412 Holly Hill LnBurlington, 27215United StatesOffice Phone: 336-538-1842Fax: 336-538-1847
- I. Miller Precision Optical Instruments Inc.325 Bustleton PikeFeasterville Trevose, 19053United StatesOffice Phone: 215-925-2285Fax: 215-925-8374
- Marathon Medical, Inc.1408 Christian Avenue Suite 35Durham, 27705United StatesOffice Phone: 919-309-4463Service Phone: 919-812-9500Fax: 919-309-4742
- Martin Microscope Company
