DM3 XL Inspection System for Microelectronics and Semiconductor

Fast detection, fast action

Stand	Sturdy metal stand
Focusing	2-gear focusing (coarse/fine with 1 µm micrometer scale with top focus stop) or 3-gear focusing (coarse/medium/fine with 1 and 4 µm micrometer scales with top focus stop) Torque coarse focus, adjustable stage height stop
Stage stroke	30 mm
Incident light	Robust incident light axis with 4-position reflector turret for BF/DF/POL/DIC and FLUO with oblique illumination with Color-Coded Diaphragm Assistant (CCDA) with centreable Aperture iris diaphragm with IL-Filter magazine for 2 filters - Ø 32 mm The following light sources can be adapted to all incident light axes: LED-Lamphousing with internal microscope control of the light intensity for incident light Mirrorhousing 106, for simultaneous adaptation of two light sources Fluo-illumination SFL100, 4000 and 7000 EL6000, Hg 50, Hg 100, Xe 75 12 V 100 W Halogen (Lamp housing series 106 or 107/2) with separate transformer
Objective turret / Objectives	5x BF/DF M32, 6x BF M25 and 7x BF M25 objective turret HI PLAN EPI Objectives 5x, 10x, 20x N PLAN EPI Objectives 2.5x - 100x PLAN FLUOTAR Objectives 1.25x - 100x PLAN APO Objectives 0.7x Macro 50x, 100x, 150x
Accessories	Optional magnification changer (1x, 1.5x, 2x) Optional measuring stage s for x, y, and z measurements
Transmitted light	Illumination via external cold light source with light fibre
Power supply	Stabilized universal power supply unit, 90 - 230 V

Do you prefer personal consulting? Show local contacts